The SL Series
SL Series Pumps
SL Datasheet
(20Kb)
SL Datasheet
(20Kb)
Diaphragm Pump Developed for Transfer of Ultra-Pure Liquids
Since 1984 ALMATEC has manufactured special pumps for the supply and circulation in the semiconductor industry. The latest generation is the SL, a pump series particularly developed for the special requirements of these applications.
Through superior quality and an attractive cost of ownership the SL is an important component in semiconductor plants. Worldwide references are proof for the acceptance of this concept.
When designing a new pump for ultra-pure liquids in the semiconductor industry, purity has to be the top priority aspect. This concerns particularly the "fail-safe" ability of a pump. The SL offers the ultimate combination of both, design and material.
The liquids to transfer in the semiconductor industry set different demands to the pumps. Therefore the SL series is available in three materials:
• 4 sizes made of PTFE for acids and caustics (model SL)
• 4 sizes made of UPPE for slurries (model SL A)
• 2 sizes made of stainless steel (SS 316 L) for solvents and strippers
All SL pumps are self-priming pneumatic diaphragm pumps which may run dry.
The pumps have a compact, simple design with few parts. The housing parts are machined from solid blocks, the basis for a long life time. So statements from customers like "the robust pump housing can has unlimited reuse" are common.
SL pumps are cleaned, assembled, and tested in a class 100 clean-room line.
Further features of series SL at a glance
• no O-ring sealing in wetted areas
• three materials (SL, SL A, SL S) with various sizes for all applications
• no metal at all (SL und SL A)
• temperature range up to 200°C (SL)
• patented, contactless cascade sealing between the product chambers
• straight-through flow pattern, only one housing part wetted
• air control system PERSWING P®, no lubrication or maintenance
• diaphragms without plates and gaskets
• cylinder valves sealing the full area
• compact, simple design with few parts, very low space requirement
• machined from solid blocks
• easy to dismantle and assemble
• no fixing elements, such as tie rods, nuts, or clamps
• separate pulsation damper available, likewise without tie rods
• diaphragm and/or stroke sensors can be retrofitted easily
• low noise level
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Since 1984 ALMATEC has manufactured special pumps for the supply and circulation in the semiconductor industry. The latest generation is the SL, a pump series particularly developed for the special requirements of these applications.
Through superior quality and an attractive cost of ownership the SL is an important component in semiconductor plants. Worldwide references are proof for the acceptance of this concept.
When designing a new pump for ultra-pure liquids in the semiconductor industry, purity has to be the top priority aspect. This concerns particularly the "fail-safe" ability of a pump. The SL offers the ultimate combination of both, design and material.
The liquids to transfer in the semiconductor industry set different demands to the pumps. Therefore the SL series is available in three materials:
• 4 sizes made of PTFE for acids and caustics (model SL)
• 4 sizes made of UPPE for slurries (model SL A)
• 2 sizes made of stainless steel (SS 316 L) for solvents and strippers
All SL pumps are self-priming pneumatic diaphragm pumps which may run dry.
The pumps have a compact, simple design with few parts. The housing parts are machined from solid blocks, the basis for a long life time. So statements from customers like "the robust pump housing can has unlimited reuse" are common.
SL pumps are cleaned, assembled, and tested in a class 100 clean-room line.
Further features of series SL at a glance
• no O-ring sealing in wetted areas
• three materials (SL, SL A, SL S) with various sizes for all applications
• no metal at all (SL und SL A)
• temperature range up to 200°C (SL)
• patented, contactless cascade sealing between the product chambers
• straight-through flow pattern, only one housing part wetted
• air control system PERSWING P®, no lubrication or maintenance
• diaphragms without plates and gaskets
• cylinder valves sealing the full area
• compact, simple design with few parts, very low space requirement
• machined from solid blocks
• easy to dismantle and assemble
• no fixing elements, such as tie rods, nuts, or clamps
• separate pulsation damper available, likewise without tie rods
• diaphragm and/or stroke sensors can be retrofitted easily
• low noise level
click here to close this window
